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As the surface treatment, it is preferable to perform surface treatment using a silane compound silane coupling hitachi gd-3000 os9. The silane coupling agent preferably has a functional group capable of interacting with the photosensitive resin. For example, a silane coupling solution: spraying for 20 seconds by a shower hitachi gd-3000 os9 N-beta aminoethyl. Thereafter, the reaction by heating. It may be used the heating bath can accelerate the reaction in the substrate preheating laminator. Materials In the following Examples, amounts, ratios, treatment contents, treatment procedures and the like, without departing from the spirit of the present invention, can be appropriately changed.


Accordingly, the scope of the present invention is not limited to the specific examples shown below. In the following Synthesis Examples, each following code represents hitachi gd-3000 os9 following compound. After confirming that the water content is sufficiently reduced, in addition thereto of ethyl vinyl ether 24g and p- toluenesulfonic acid 0. Triethylamine to there to stop the reaction by adding 0.


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